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SYLLABUS, Abbreviated In this introductory MEMS class, we cover the fundamental basis of microsystems technology. Microelectromechanical devices (MEMS), such as actuators, pressure sensors, and opto-mechanical assemblies, require knowledge of a broad range of disciplines, from microfabrication and mechanics to chemistry and solid state device physics. These topics are covered in this demanding course, which includes a mandatory laboratory component. 489F vs. 808K Students (both undergraduate and graduate) can register for either 489F or 808K, as they wish. Students registered for 808K will do additional assignments and homework problems and have extra problems on quizzes and exams. Lecturer Dr. Elisabeth Smela Laboratory Instructors Tom Loughran, Jon Hummel, John Abrahams, and Gerry Becker Alternate contact: Textbook G. T. A. Kovacs, “Micromachined Transducers Sourcebook”, WCB/McGraw-Hill, Boston, 1998. ISBN 0-07-290722-3 Recommended but not required: B. G. Streetman and S. Banerjee, “Solid State Electronic Devices”, Fifth Edition, Prentice Hall, Saddle River, 2000. ISBN 0-13-025538-6 Class Web Site Communication between instructor and students outside the classroom will be primarily through Blackboard (https://bb.eng.umd.edu). Introduction This course is the introductory MEMS offering at the University of Maryland. It will prepare you for more advanced study (courses such as ENME 602, MEMS Device Physics and Design; ENME 808U, Microfluidics and BioMEMS, and ENEE719R Advanced Topics in Microelectronics: Design and Fabrication of Micro-Electro-Mechanical Systems, or graduate study in MEMS). Material Classroom The book for the course, Kovacs, is an excellent, valuable resource for those students who continue in this field. I will use classroom time to supplement the material in the book and answer any questions you have about the reading. Lectures will cover some aspects of what you’ve read in more depth, as well as cover some material that is not covered in the book. We will occasionally have guest speakers. Lectures will cover semiconductor device physics, microfabrication techniques, fabrication sequences, and mask design. The major components of the first semester of this course will include the topics listed below.
We will mix device physics and MEMS in the lectures. Semiconductor device physics is covered because mechanical engineers do not have the necessary background to study MEMS, which arose from Si chip technology, and it cannot be understood properly without this knowledge. Everything written in this field presumes that the reader has this background. Laboratory Component The lab will give you the opportunity to get hands-on experience with basic processing steps. The class has several 3-hour slots a week. You will thus have one lab period every three weeks in groups of no more than six, with 4 labs total during the semester. Because of the constraint on the lab time, class enrollment is limited. Lab times will be scheduled around the schedules of the students in the class, so that everyone is able to attend. You are responsible for showing up at your lab slot on time. The labs will be held in the Kim building clean room teaching lab. The lab topics are as follows.
All supplies needed for the labs will be provided. Assessment The course grade will be calculated as follows. Point breakdowns for each of these major components will be posted online. Grading will not be on a curve.
Assignments Reading Students are expected to have done the assigned reading for each lecture and should be prepared to discuss it in class. A quiz will be given on every reading assignment during the first few minutes of class. Homework Homework assignments and problem solutions will be posted online. Students should view homeworks as learning experiences. Each student should hand in his/her own version of the homework, and this should not be copied from another student; you should work through the problems on your own. Homework problems that are seriously attempted will be given full credit. Exams There will be two in-class exams and a final. Exams will be comprehensive. Course Objectives The goals of the course are for you to:
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